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特性：

真空燒結(jié)爐為內(nèi)熱式電阻加熱真空爐，由爐體、加熱室、真空機(jī)組、冷卻水系統(tǒng)、充放氣系統(tǒng)及電控系統(tǒng)等組成。

一、真空燒結(jié)爐爐體：

a) 雙層水冷結(jié)構(gòu)、材質(zhì)為304不銹鋼，內(nèi)部按高真空要求拋光，外部拋光后噴砂處理；

b) 立式結(jié)構(gòu)，爐體為圓柱形，下部為封頭，上部為真空法蘭。爐門位于爐體上方，與爐體為法蘭連接，密封結(jié)構(gòu)為法蘭形式，耐高溫氟橡膠唇型圈密封，手輪螺栓鎖緊；

c) 真空口位于爐體上部，與真空機(jī)組真空法蘭連接，耐高溫氟橡膠O型圈密封；

d) 電極引入裝置位于爐體的下部，共計(jì)三組。材質(zhì)為紫銅。爐內(nèi)與爐外采用剛玉管絕緣，封接結(jié)構(gòu)。與爐體采用法蘭連接，O型密封圈；

e) 爐體上裝有充放氣裝置，充氣口位于爐體的下方，放氣口位于爐體的上方；

f) 爐體上設(shè)有一個(gè)控溫口，鎢錸熱電偶測(cè)溫；并設(shè)有電極引入裝置用于1100℃保溫狀態(tài)下均溫性測(cè)量。

二、真空燒結(jié)爐加熱室：

a) 用于真空或保護(hù)氣氛。

b) 發(fā)熱體是高強(qiáng)石墨加熱器（采用日本東海碳素石墨，該石墨電阻率穩(wěn)定、灰份低、導(dǎo)熱性均勻），它在均溫區(qū)外環(huán)形對(duì)稱分布，采用三區(qū)分布的加熱方式保證了最佳的溫度均勻性和工件的均勻受熱。

c) 保溫材料為美國(guó)進(jìn)口硬質(zhì)碳?xì)郑ū�溫材料是真空爐的重要組成部分，我公司設(shè)備的保溫材料均采用美國(guó)進(jìn)口硬質(zhì)碳?xì)�，其產(chǎn)品具有優(yōu)良的隔熱性能， 低灰分、碳化溫度高、低容重、熱膨脹系數(shù)小等特點(diǎn)，是高溫真空爐必備的高性能絕熱材料）及莫來(lái)石保溫氈反射屏；

d) 發(fā)熱體更換方便。整個(gè)加熱區(qū)可以作為一個(gè)結(jié)構(gòu)完備的部件被拆卸出來(lái)，便于維護(hù)和修理。裝料臺(tái)安裝在爐子底座上，由耐高溫的材料支承組成。

三、真空燒結(jié)爐真空系統(tǒng)：

a) 采用KT-250擴(kuò)散泵/ZJP-150羅茨泵/2X-30旋片泵三級(jí)高真空機(jī)組，機(jī)組前加過(guò)濾器，延長(zhǎng)真空泵的使用壽命；

b) 真空閥、電磁放氣閥、管路、波紋管等組成機(jī)組；管路上留有檢漏口、真空計(jì)接口；

四、冷卻水系統(tǒng)：

根據(jù)真空爐各部分對(duì)冷卻水的要求，制作集水排、由閥門、管路等組成；對(duì)爐體、爐門、密封圈、真空泵及水冷電極等進(jìn)行冷卻。其中總進(jìn)水管路安裝水壓傳感器確保設(shè)備安全。

五、充放氣系統(tǒng)：

由電磁閥、微調(diào)閥及管路構(gòu)成，可設(shè)定不同的充氣壓力范圍，通過(guò)壓力開(kāi)關(guān)可自動(dòng)充氣和補(bǔ)氣。

六、電控系統(tǒng)：

a) 采用歐姆龍可編程控制器PLC、便攜式筆記本電腦、自主開(kāi)發(fā)的組態(tài)軟件,根據(jù)工藝要求對(duì)設(shè)備進(jìn)行自動(dòng)控制、數(shù)據(jù)采集、數(shù)字顯示以及存貯記錄。可記錄和顯示溫度、真空度、壓力等參量的變化。存貯數(shù)據(jù)可查詢、復(fù)制，連接打印機(jī)（用戶自備）可打印輸出歷史曲線記錄。

b) 日本島電公司FP93數(shù)顯控溫表，用來(lái)對(duì)升溫過(guò)程進(jìn)行智能控制及顯示，使升溫過(guò)程按照工藝要求分步分段進(jìn)行；測(cè)溫選用鎢錸熱電偶；

c) 加熱電源：三相、晶閘管可控硅電源；

d) 復(fù)合數(shù)顯真空計(jì)，低真空下為熱偶計(jì)，高真空下為電離計(jì)；

e) 所有儀表及控制元件集中在一個(gè)特制電控柜內(nèi)；

f) 設(shè)置必要的報(bào)警及保護(hù)，例如超溫、水壓低、氣壓低等。

七、 工作平臺(tái):

由型鋼及連接件制造一個(gè)操作平臺(tái)，上部鋪設(shè)不銹鋼板。下部放置真空機(jī)組及變壓器，水冷接口，電極引入銅排等，上部放置真空爐體及控制面板。

Internal heat type resistance heating vacuum sintering furnace

Features :

The vacuum sintering furnace is an internal heat type resistance heating vacuum furnace, which is composed of a furnace body, a heating chamber, a vacuum unit, a cooling water system, a charging and discharging system, and an electric control system.

First, the vacuum sintering furnace body:

a)      Double-layer water-cooled structure, made of 304 stainless steel, internally polished according to high vacuum requirements, externally polished and sandblasted;

b)     Vertical structure, the furnace body is cylindrical, the lower part is the head, and the upper part is the vacuum flange. The furnace door is located above the furnace body, and is flanged to the furnace body, the sealing structure is in the form of a flange, the high temperature resistant fluoro rubber lip ring is sealed, and the hand wheel bolt is locked;

c)      The vacuum port is located at the upper part of the furnace body, and is connected with the vacuum flange of the vacuum unit, and the high temperature resistant fluorine rubber O-ring is sealed;

d)     The electrode introduction device is located at the lower portion of the furnace body in a total of three groups. The material is copper. In-furnace and outside the furnace are insulated with corundum tubes and sealed. Flange connection with the furnace body, O-ring;

e)      The furnace body is provided with a charging and discharging device, the inflating port is located below the furnace body, and the air discharging port is located above the furnace body;

f)       The furnace body is provided with a temperature control port, and the tungsten germanium thermocouple measures the temperature; and an electrode introduction device is provided for the temperature uniformity measurement at 1100 ° C.

Second, the vacuum sintering furnace heating chamber :

a)      Used for vacuum or protective atmosphere.

b)     The heating element is a high-strength graphite heater (using the East China Sea carbon graphite, the graphite has stable resistivity, low ash content and uniform thermal conductivity) , and it is circularly symmetrically distributed outside the uniform temperature zone, and the three-zone heating method ensures the most Excellent temperature uniformity and uniform heating of the workpiece.

c)      Insulation material is imported from the United States. Hard insulation material is an important part of vacuum furnace. The insulation materials of our equipment are made of hard carbon felt imported from the United States. The products have excellent thermal insulation properties, low ash and high carbonization temperature. , low bulk density, small coefficient of thermal expansion, etc., is a high-performance thermal insulation material necessary for high-temperature vacuum furnaces) and mullite insulation felt reflective screen;

d)     The heating element is easy to replace. The entire heating zone can be removed as a structurally complete part for easy maintenance and repair. The loading station is mounted on the base of the furnace and is composed of a material that is resistant to high temperatures.

Third, the vacuum sintering furnace vacuum system :

a)      Adopt KT-250 diffusion pump/ZJP-150 Roots pump/2X-30 rotary vane pump three-stage high vacuum unit, add filter before the unit to extend the service life of vacuum pump;

b)     Vacuum valve, electromagnetic bleed valve, pipeline, bellows, etc.; the leak detection port and vacuum gauge interface are left on the pipeline;

Fourth, the cooling water system :

According to the requirements of the cooling water in each part of the vacuum furnace, the water collecting row is made up of valves, pipelines, etc.; the furnace body, the furnace door, the sealing ring, the vacuum pump and the water-cooled electrode are cooled. The water inlet sensor is installed in the total inlet pipe to ensure the safety of the equipment.

Fifth. Charging and discharging system :

It consists of a solenoid valve, a trim valve and a pipeline. Different inflation pressure ranges can be set, and the pressure switch can automatically inflate and liquefy.

Sixth, electronic control system :

a)      Using OMRON programmable controller PLC , portable notebook computer, self-developed configuration software , automatic control, data acquisition, digital display and storage recordaccording to the process requirements . Changes in parameters such as temperature, vacuum, and pressure can be recorded and displayed . The stored data can be queried, copied, and connected to the printer (user-supplied) to print out the historical history record.

b)     Japan Island Electric Company FP93 digital display temperature control meter, used to intelligently control and display the heating process, so that the heating process is carried out step by step according to the process requirements; the temperature measurement uses tungsten-rhodium thermocouple;

c)      Heating power supply: three-phase, thyristor thyristor power supply;

d)     Composite digital vacuum gauge, thermocouple under low vacuum, ionization gauge under high vacuum;

e)      All instruments and control components are concentrated in a special electrical control cabinet;

f)       Set the necessary alarms and protections, such as over temperature, low water pressure, low air pressure, etc.

Seventh, work platform :

An operating platform is made of steel and connecting parts, and stainless steel plates are laid on the upper part. The vacuum unit and the transformer are placed in the lower part, the water-cooled interface, the electrode is introduced into the copper row, and the vacuum furnace body and the control panel are placed on the upper part.

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